潔凈室壓差風(fēng)量主動控制方法探討
2010-08-25 16:39:43 閱讀()
摘要: 【中文摘要】 本文總結(jié)了關(guān)于縫隙特性的研究和目前工程中潔凈室壓差風(fēng)量的計算方法,根據(jù)這些方法設(shè)計人員仍然難以準(zhǔn)確確定潔凈室的壓差風(fēng)量,作者通過調(diào)查指出了目前潔凈室設(shè)計和施工中存在壓差風(fēng)量偏大的問題,問題的起因不是因為潔凈室不能做到要求的密封性,而是在于密封性比較好的潔凈室存在調(diào)試的困難。本文從便于實現(xiàn)壓力控制和節(jié)能的角度出發(fā),提出了對潔凈室的壓差風(fēng)量進(jìn)行主動控制的觀點和并通過實驗初步探討了相應(yīng)的控制方法。 【英文摘要】 The research of the character of cracks and the methods of calculating the air flow rate for pressurization of cleanroom were summarized. However, the designers still can not figure out the air flow rate precisely based on these methods. Through investigation it is proved that this air flow rate is magnified in many cleanrooms. It is not because low-qualified air tightness of the enclosure, but because the difficulties in testing. From the view of pressure control and energy saving, the author pointed out that the air flow rate should be controlled actively and then provided the method to control it by analyzing an experiment. 【中文關(guān)鍵詞】 潔凈室; 縫隙; 壓差風(fēng)量; 壓力控制【英文關(guān)鍵詞】 cleanroom cracks pressurized air flow rate pressure control
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